Germar Schneider, Paul Patolla, Matthias Fehr, Dirk Reichelt, Feryel Zoghlami, and Jerker Delsing

Micro Service based Sensor Integration Efficiency and Feasibility in the Semiconductor Industry

The semiconductor industry is strongly increasing the production capacities and the product portfolio for a wide range of applications that are needed in the worldwide supply chains e.g. the automotive, computer and security industry. The complex manufacturing processes require more automation, dig- italisation and IoT frameworks, especially for highly automated semiconductor manufacturing plants. Over the last years, this industry spent much effort to control highly sensitive materials in production by product monitoring using advanced process control by various sensors in production. Nevertheless, until today, sensor integration, especially for such sensors that are not supported by the equipment vendors, is time-consuming and complicated. This article aims to use a micro-service-based approach by Eclipse Arrowhead as an open-source microservice architecture and implementation platform [1]. This architecture is an easy and powerful framework that can be used for multiple sensor applications to control the manufacturing material flow in a modern semiconductor plant with a high product mix. The article describes how the engineering process was designed, the architecture of the use case and the main benefits in the operational business are shown.

Reference:

DOI: 10.36244/ICJ.2022.3.10

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Please cite this paper the following way:

Germar Schneider, Paul Patolla, Matthias Fehr, Dirk Reichelt, Feryel Zoghlami, and Jerker Delsing, "Micro Service based Sensor Integration Efficiency and Feasibility in the Semiconductor Industry", Infocommunications Journal, Vol. XIV, No 3, September 2022, pp. 79-85., https://doi.org/10.36244/ICJ.2022.3.10